Chinese translation for "lpcvd"
|
- 低压化学气相沉积
低压化学气相淀积 低压化学汽相淀积
- Example Sentences:
| 1. | Secondly , a novel technology is proposed which includes several key steps such as lpcvd ( low pressure chemical vapor deposition ) nitride silicon and cmp ( chemical mechanical polishing ) 其次,设计包含低压淀积氮化硅和化学机械抛光( cmp )等关键步骤的新的soi介质隔离工艺流程。 | | 2. | A design of using lpcvd silicon - rich silicon nitride of low residual stress as the resonant beam is proposed based on technology of sacrificial porous silicon and a new type peninsula structure is also proposed for high pressure sensitivity 提出了基于多孔硅牺牲层技术的利用lpcvd生长的低应力厚的富硅氮化硅作为谐振梁的压力传感器结构设计。为了提高灵敏度,还提出了一种半岛结构。 | | 3. | 3 . the gap defects in multilayer cvd sic coatings could be effectively controlled by means of slow deposition in low - pressure chemical vapor deposition ( lpcvd ) . 2d c / sic composites with a multi - layer cvd sic coating prepared by slow lpcvd showed weight gain at 1300 @ in air condition ( 3 )采用慢速减压化学气相沉积工艺实现了对多层cvdsic涂层面缺陷的有效控制,实现了单一cvdsic涂层保护2dc sic在高温下( 1300 )的氧化增重。 | | 4. | The tested materials include ( 100 ) silicon wafer , ( 110 ) silicon wafer , poly - silicon thin film , dry oxidized silicon dioxide thin film , wet oxidized silicon dioxide thin film , lto thin film , standard lpcvd silicon nitride film , low stress lpcvd silicon nitride film , alumni nitride film , zinc oxide film etc . in the nanoindentation experiment of the single crystal silicon , two different mechanical phases are observed at different indentation depth 用纳米压入法对( 100 )单晶硅及( 110 )单晶硅、多晶硅薄膜、干氧薄膜、湿氧薄膜、 lto薄膜、标准氮化硅薄膜、低应力氮化硅薄膜、氮化铝薄膜、氧化锌薄膜等重要材料的杨氏模量和纳米硬度进行了系统地测量。报道了单晶硅在压入过程中观测到的两个力学相的变化。 | | 5. | The work mainly consists of four parts : the first part is to use oxidation and lpcvd technique to produce sio2 mask film and si3n4 insulation film in order to enhance the heating efficiency of micro chamber , and guarantee the carry out of the reaction . the second part is to use the combination of dry etching and wet etching to produce reaction micro chamber , it is the container which carry out the pcr reaction , and dna sample carry out amplification reaction here . the third part is to use the sputtering , photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the pcr reaction 首先,利用氧化工艺和lpcvd技术,生长sio _ 2掩膜层和si _ 3n _ 4绝缘层,以提高反应腔的热效率,保证扩增反应的顺利进行;其次,用湿法腐蚀和干法刻蚀相结合的方法加工微型腔体,使之作为dna样品进行pcr扩增反应的容器;第三,用溅射、光刻等工艺在微型腔体底部制作微型加热器和温度传感器,实现对反应腔体的加热及其温度的精确测量,提供pcr扩增反应所需的温度条件。 |
- Similar Words:
- "lpcf local procedure call facility" Chinese translation, "lpci" Chinese translation, "lpci link protocol control information" Chinese translation, "lpcl" Chinese translation, "lpcm linear pulse code modulation" Chinese translation, "lpd" Chinese translation, "lpd line printing daemon" Chinese translation, "lpd amphibious transport dock ship" Chinese translation, "lpd language processing and debugging" Chinese translation, "lpd large panel display" Chinese translation
|
|
|