光刻机 meaning in Chinese
lithography machine
photoetching machine
Examples
- Aligner proximity type
接近式光刻机 - The wafer processing system is an important subsystem of the lithography , which consists of a wafer transmission system and a wafer pre - alignment system
晶圆处理系统是光刻机的重要组成子系统,其包含两个主要部分:晶圆传输系统和晶圆预对准系统。 - How to use the measured effective diffusion length and scanner illumination condition to demonstrate photolithography line width uniformity is introduced
摘要介绍了如何通过测量得出的等效扩散长度和光刻机的照明条件来对任何光刻工艺的线宽均匀性进行评估。 - To predict lithographic results well for opc purpose , a fast , practical and efficient lithographic model , which is suitable for opc processing of complicated 1c layouts , is becoming an important research topic
因此，一种能满足版图opc处理软件要求的，快速、实用而又足够精确的光刻机光学系统模型就成为一个重要的研究课题。