光刻成像 meaning in Chinese
optical patterning
Examples
- Based on the theory of partial coherent diffraction and frt , an approach for fractional fourier domain filtering is presented as a new wavefront engineering method to improve the image quality in photolithography
基于部分相干成像理论和分数傅立叶变换滤波等理论，我们提出了利用分数傅立叶域滤波改善光刻成像质量的波前工程新思想和新方法。 - In the past , process controls of thick resist lithograph have been studied extensively . on the contrary , much less investigation has been done concerning its imaging transmission . unfortunately , the existent exposure and development simulation models are only appropriate for thin film resist
但目前关于厚层抗蚀剂光刻方面的研究，主要局限于实验工艺的改进上，对其图形传递机理的研究做得很少，现有的曝光、显影模型均未考虑厚层抗蚀剂光刻成像的一些特殊属性，一定程度上制约了厚胶光刻术的深入发展和应用。