光刻术 meaning in Chinese
photolithography
Examples
- A lot of micro machining technologies are developed to fabricating memss . recently , lithograph of thick resist has been regarded as an effective and economical technology for manufacturing excellent high - aspect - ratio microstructures ( harms )
近年来，作为制作优质大高宽比微结构的厚层抗蚀剂光刻术以其工艺简单、制作成本低等优点受到国际上广泛重视。 - In the past , process controls of thick resist lithograph have been studied extensively . on the contrary , much less investigation has been done concerning its imaging transmission . unfortunately , the existent exposure and development simulation models are only appropriate for thin film resist
但目前关于厚层抗蚀剂光刻方面的研究，主要局限于实验工艺的改进上，对其图形传递机理的研究做得很少，现有的曝光、显影模型均未考虑厚层抗蚀剂光刻成像的一些特殊属性，一定程度上制约了厚胶光刻术的深入发展和应用。