| 1. | Magnetization magneto - microwave plasma etching system
磁场微波型等离子体蚀刻系统 |
| 2. | Magnetron enhanced reactive ion etaching system
磁控管增强型反应性离子蚀刻系统 |
| 3. | Inductively coupled plasma etching system
感应耦合型等离子体蚀刻系统 |
| 4. | Parallel plate reactive ionetching system
平行板反应性离子蚀刻系统 |
| 5. | Narrow gap reactive ion etching system
狭窄间隙反应性离子蚀刻系统 |
| 6. | Reactive ion beam etching system ribe system
反应性离子束蚀刻系统 |
| 7. | Reactive ion etching system rie system
反应性离子蚀刻系统 |
| 8. | Barrel type plasma etching system
圆筒型等离子体蚀刻系统 |
| 9. | Reactive sputter etching system
反应性溅镀蚀刻系统 |
| 10. | Photo excited etching system
光激励蚀刻系统 |
