The reason of not uniform of oxide thickness in an inner burning h2 and o2 combination oxidation furnace is analyzed 摘要分析了在采用内燃结构进行氢氧合成氧化过程中，造成氧化层厚度不均匀的原因。
2.
The experiment results show that this new method to oxidate the combination of h2 and o2 is very easy in use and can improve the uniformity greatly 实验结果表明，此方法简单易行，能够有效改善氢氧合成氧化的均匀度，并已用于微电子工艺研究和生产中。
