Chinese translation for "投影光学系统"
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- projection optical system
Related Translations:
投影显示: projected displayprojection display 投影直径: diameter projectedprojected diameter 投影轨迹: projected footprint 投影器: balopticoncamera of projectionprojecting apparatusprojection glassprojector 球形投影: globular projection 矩形投影: rectangular projection
- Example Sentences:
| 1. | Design of telecentric beam path for zoom projection optics 变焦距投影光学系统中的远心光路设计 | | 2. | Being one of the key technologies of euvl , the alignment of optical lithography system affects directly the final imaging quality of the system 作为euvl关键技术之一,微缩投影光学系统的精密装调直接影响着系统的最终成像质量。 | | 3. | If it is combined with high quality reduction projecting system , the fabrication of sub - micron diffractive optical elements can be realized completely 数字微镜如果结合高质量的高倍精缩投影光学系统,完全可实现亚微米级衍射微光学元件的制作。 | | 4. | Finally , the schwarzschild objective of euvl is assembled and aligned on the common - axis illuminated structure with the wfe of 0 . 0202x ( a , = 632 . 8nm ) rms . using an off - axis circular subaperture of the full annular pupil , the wfe of the schwarzschild objective is 0 . 0144a , ( x = 632 . 8nm ) rms 最终对euvl系统中的schwarzschild微缩投影光学系统进行装调,验证了系统装调的收敛性,装调后系统的最终波像差为0 . 0144 rms ( = 632 . 8nm ) 。 | | 5. | To validate this analysis and to obtain a more accurate characterization of the system , simulated alignments of the schwarzschild objective are performed . using bruning method , the two spherical mirrors of the schwarzschild objective are measured and the measurement accuracy is improved obviously 利用bruning绝对测量方法对euvl微缩投影光学系统的两个球面进行了高精度检测,检测的精度比用zygo干涉仪直接检测有明显的提高。 | | 6. | The projection optics with aspherical mirror of sub - nanometer accuracy are required to get a resolution of less than 0 . 1 m m and wide exposure area simultaneously . the precision of polishing and testing for such ashperical surface is fairly high and it has not been achieved yet in our current state Euvl微缩投影物镜为了同时实现大的曝光视场和0 . 1 m以下的成像分辨率,微缩投影光学系统需采用面形精度达亚纳米量级的非球面,但我们现阶段的光学加工和检测技术距此要求尚有一定的差距。 |
- Similar Words:
- "投影光刻法" Chinese translation, "投影光刻机" Chinese translation, "投影光束" Chinese translation, "投影光学" Chinese translation, "投影光学比较仪" Chinese translation, "投影光源" Chinese translation, "投影轨迹" Chinese translation, "投影函数" Chinese translation, "投影号料" Chinese translation, "投影号料台" Chinese translation
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