Chinese translation for "反应离子刻蚀"
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- reactive ion etching rie
rie
Related Translations:
刻蚀: [地质学] sculpture; corrosion; mechanical erosion◇刻蚀法 etching method
- Example Sentences:
| 1. | Fabrication of ultra deep electrical isolation trenches with high aspect ratio using drie and dielectric refill 用深反应离子刻蚀和介质填充技术制造具有高深宽比的超深电隔离槽 | | 2. | The reactor is capable of working in the rie ( reactive ion etching ) mode and also in the plasma etching mode 反应腔拥有在rie (反应离子刻蚀)模式和等离子刻蚀模式下工作的能力。 | | 3. | The typical rie fault was illustrated to build up the fault tree and qualitatively analyze rie fault by resolving the minimum practical fault 以反应离子刻蚀( rie )设备的典型故障为例,建立故障树,通过求解最小实际故障来进行定性分析。 | | 4. | Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching ( ecr - rie ) equipment to improve its property of weave 摘要采用微波电子回旋共振等离子体反应离子刻蚀( ecr - rie )装置对牦牛毛纤维进行表面改性,从而改善牦牛毛的可纺性。 | | 5. | By studying and using conventional 1c process in combination with electron beam lithography ( ebl ) , reactive ion etching ( rie ) and lift - off process , several efficient results are produced : semiconductor and metal nano - structures are fabricated ; the matching problem of photolithography and electron beam lithography is well solved ; the process efficiency is improved ; the process is offered for the controlled fabrication of nano - structures by repetitious process testing ; several nano - structures such as si quantum wires , si quantum dots , double quantum dot structures and tri - wire metal gate are firstly fabricated by using ebl and rie processes 研究利用常规的硅集成电路工艺技术结合电子束光刻,反应离子刻蚀和剥离等技术制备半导体和金属纳米结构,很好地解决了普通光刻与电子束光刻的匹配问题,提高了加工效率,经过多次的工艺实验,摸索出一套制备纳米结构的工艺方法,首次用电子束光刻,反应离子刻蚀和剥离等技术制备出了多种纳米结构(硅量子线、量子点,双量子点和三叉指状的金属栅结构) 。 |
- Similar Words:
- "反应类化" Chinese translation, "反应类化梯度" Chinese translation, "反应类型" Chinese translation, "反应冷淡" Chinese translation, "反应离子腐蚀" Chinese translation, "反应离子蚀刻法" Chinese translation, "反应离子束刻蚀" Chinese translation, "反应历程" Chinese translation, "反应立体异构体" Chinese translation, "反应粒子" Chinese translation
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