The measured spectra were transformed to the concentration profiling of the recoil atoms by using the knowledge of the rutherford cross section and the stopping power of the projectile and the recoils in the materials 利用卢瑟福散射截面和离子在靶材料中的阻止本领，编制程序将能谱转换成元素的深度分布。从而实现高精度的深度分辨测量。
