| 1. | Movable device is another kind of typical moems device
Moems可动器件是moems器件的又一典型类型。 |
| 2. | Moems accelerometer based on double fabry - perot interferometers and closed loop
干涉仪的闭环微光机电加速度计 |
| 3. | The technology of liga series is one of the key - technology of moems
Liga类工艺技术是moems的关键制作技术之一。 |
| 4. | Tiny optical device used in x - ray band is one of typical devices of moems
用于x射线波段的微小光学器件是moems典型器件之一。 |
| 5. | Micro device is the fundamental part of moems , and micro - fabrication technique is its basic technology
微光机电器件是moems的基本组成单元，微制作技术是moems的技术基础。 |
| 6. | As one of the typical moems , the micro - spectrometer has many advantages compared with traditional spectrometers . it can be used in many areas
作为一种典型微型光机电系统? ?微型光谱仪器，具有许多大型光谱仪器所不具备的优点，并有着广泛的应用范围。 |
| 7. | These works are supported from the natural science foundation of china , national 863 high technology project , national 973 projects and the science foundation of jilin province
本论文在国家自然科学基金、国家863计划、国家973计划、吉林省科技发展计划等资助下对moems器件及其关键技术进行了研究探讨。 |
| 8. | In recent years , with micro - electro mechanical systems ( mems ) penetrating gradually through optics , a full new technique field - micro - opto - electro - mechanical systems ( moems ) came into being in 1990 ' s
最近几年来，微电子机械系统( mems )逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域?微光机电系统( moems ) 。 |
| 9. | Movable infrared tunable micro filter , 8x8 moems optical switch array and micro electromagnetic actuator used as driver of moems movable device are separately explored in chapter three . firstly , the infrared tunable micro filter is designed according to theory analysis of micro tunable grating
论文用三章的篇幅分别对微型可调谐红外滤光器、 8 8moems阵列光开关等可动器件及作为moems可动器件驱动源的微型电磁驱动器进行了探索。 |
| 10. | Micro - channel electrophoresis chip ( mce chip ) system is a newly developed research field . the micro - channel network on the chip is manufactured by the technology of micro opto electro mechanical system ( moems ) on the substrate of glass , fused silica , pdms etc . sample separation is performed in the micro - channel and detected by opticcal or chemical methods
微通道电泳芯片( micro - channelelectrophoresischip , mcechip )系统是利用微光机电系统( moems )技术在玻璃、石英、有机聚合物等基片上刻蚀出预设计好的微通道网络，并在其中进行样品的电泳分离，利用光学或化学等方法进行检测。 |
