| 1. | Euv extreme ultraviolet lithography
极端紫外平版印刷 |
| 2. | Euv extreme ultraviolet radiation
超紫外辐射 |
| 3. | The first chapter is introduction , which mainly introduce the detector used in extreme ultraviolet ( euv ) and soft x - ray band
论文第一章是绪论，主要介绍了在极紫外和软x射线波段使用的一些光电探测器。 |
| 4. | Since the special characteristics of euv components , the imaging quality and the transmission are severely restricted by the components of eut
由于euv波段光学元件特有的光谱特性，每个光学元件的性能指标对eut的传输效率及成像质量都有重要的影响。 |
| 5. | In euv and soft x - ray band , the most often used detector is ion chamber with rare gas , from whose collective electrode we can directly calculate intensity of photon flux
在极紫外和软x射线波段常用的探测器是稀有气体电离室，可以通过电离室收集极的收集电流直接计算出光子流强度。 |
| 6. | At present , euv / x - ray optical component are in great demand on the construction of the rapidly developed synchrotron radiant lamp - house and beam of light engineering in developed countries
目前世界各发达国家迅速发展的同步辐射光源与光束线工程的建设需要大量的euv x - ray光学元件。 |
| 7. | Synchrotron radiation source ' s excellent characteristic made it as ideal euv and soft x - ray standard source , the spectrum can be calculated from the storage ring parameters
同步辐射的一系列优异的特性决定了它是非常理想的极紫外和软x射线标准光源，辐射光谱可以通过存储环的参数计算得到。 |
| 8. | The technology on the processing and detection of the extreme - ultraviolet radiation and x - ray ( euv / x - ray ) optical component is one of the main categories in modern short - wave band optical research
极紫外与x射线( euv x - ray )光学元件的加工与检测技术的研究是近代短波段光学研究的主要范畴之一。 |
| 9. | Its main purpose is to know different kinds of detecting method . generally , euv and soft x - ray photodetector included five types : ionization gas , semiconductor , electron multiplier and film
总的说来极紫外和软x射线光电探测器的类型有气体电离型、半导体型、电子倍增器以及极紫外和软x射线胶片(干板) 。 |
| 10. | The main research purposes of this thesis are to develop the physical , technical and operational design related to the solar x - euv imaging telescope . parts of the critical techniques of system are tackled
本论文的主要研究内容开展太阳x - euv成像望远镜相关的物理设计、技术设计及在轨运行方案，并完成系统的部分关键技术攻关。 |
