等离子体刻蚀工艺 meaning in Chinese
drie
Examples
- Finally , according to the technique of plasma etching , an evolution model describing the spatio - temporal profiles of the micro - trench is established . and that we simulated the effects of collisions and the source parameters on the etching profiles
最后，针对等离子体刻蚀工艺，建立了微结构区剖面的时空演化模型，并模拟了碰撞效应和电源参数对刻蚀剖面演化的影响。