| 1. | In this thesis , the technology of saw motor is studied on the aspects of the theories , simulations and experiments 本论文以理论分析、计算机仿真和实验相结合的方法,研究了表面弹性波马达技术。 |
| 2. | The motion model of saw motor is set up by the formulae of hertz ' s theory and coulomb ' s friction law 以计算球体?平面挤压形变的赫兹公式和计算摩擦力的库仑定律为基础,建立了表面弹性波马达的运动模型。 |
| 3. | The rf power amplifier and mechanical system of saw motor is fabricated , and a saw motor is developed successfully 完成了表面弹性波马达射频驱动电源功率放大器,机械结构的设计与制作,成功研制出一台表面弹性波马达样机。 |
| 4. | The transient responses of saw motor under different working conditions are simulated by the euler method , and many factor that affect the motion of the saw motor are introduced 并用euler数值计算方法对不同工作条件下的表面弹性波马达暂态响应做了仿真,揭示了各种因素对表面弹性波马达运行的影响。 |
| 5. | The effectivity of the approximation of rayleigh wave in semi - infinite media to the plane mode in the stator transducer of saw motor with finite thickness ( much bigger than the wavelength of the saw ) is evaluated first time by us 首次探讨了用瑞利波近似表面弹性波马达定子换能器(厚度远大于表面弹性波波长)平板振动模式的有效性。 |
| 6. | Three possible contact driving mechanisms of saw motor are discussed , and the frictional drive of saw motor is shown by the linear relation between the speed of the slider and the driving voltage 探讨了表面弹性波马达三种可能的接触传动机理,并以表面弹性波马达动子速度与驱动电压呈线性的关系,首次证实了表面弹性波马达的工作原理是接触摩擦传动。 |
| 7. | Surface acoustic wave ( saw ) motor is a novel micro actuator , which generates saw with the electroacoustic transducer and transfers it to the power of saw motor by the frictional force between the slider and the stator 表面弹性波马达是一种以电声换能器产生表面弹性波,并通过马达动子和定子的接触摩擦将表面弹性波振动转换为马达动力的新型执行器。 |
| 8. | On the 128 degrees rotated , y - cut and x - propagation substrate of linbo3 , the interdigital saw transducer of 400um in electrode pitch and 100um in electrode strip is designed and fabricated by the technique of photolithography 在128度旋转, y向切割, x向传播的linbo _ 3晶片上,设计、并用光刻技术制作了电极周期为400 m ,电极线宽为100 m的叉指型表面弹性波换能器。 |
| 9. | The method of using the tip of atomic force microscopy and beam - deflection to on - line detect the nanometer vibration of the particle in the saw is introduced , and the saw amplitude of 6 . 7 nm is measured when a driving voltage of 3 . 5 v is applied 并用这种方法在激振电压峰峰值为3 . 5v时,对压电材料linbo _ 3表面弹性波进行了实时测量,得到表面弹性波振幅约为6 . 7nm 。 |
| 10. | The main achievements are concluded in the following paragraphs . the elastic wave equations and the boundary conditions of saw in different media are studied , and the behaviors of saw in the isotropic , anisotropic and piezoelectric media are fully discussed 主要的研究工作总结如下:通过对不同介质中的弹性波方程和表面弹性波边界条件的研究,对各向同性、各向异性以及压电介质中的表面弹性波行为进行了详细的讨论。 |