| 1. | Latest progress in plasma microfabrication technology
等离子体微细加工技术的新进展 |
| 2. | A new technique for fabricating emif in thin film ic based on superfine processing technique is proposed
摘要提出一种基于集成电路超微细加工技术制造电磁干扰滤波器的薄膜集成制造新技术。 |
| 3. | Along with the development of micro electrical mechanical system ( mems ) technology , the mems manufacture technology will take on diversification , and the structure of mems chip will become more and more complex
而随着微机械技术的发展，微细加工技术更加多样， mems基片的结构将更加复杂，因此探索一种新的能够满足要求的测量方法势在必行。 |
| 4. | Meanwhile , we are pursuing a number of developments in the nanotechnology field by integrating the above - mentioned composite material technology with precision forming technology , fine processing technology and analysis measurement technology
我们还将融合上述复合材料技术，精密成形技术，微细加工技术以及解析和计量技术，在纳米领域开辟新纪元。 |
| 5. | Though enormous efforts have been made to overcome this difficulty , the problem has not been solved perfectly . laser assisted microprocessing of semiconductors have the advantages of “ low temperature processing ” and “ direct writing ”
半导体的激光微细加工技术具有“低温处理” 、 “局域升温”的独特优势,将该技术应用于单片oeics的制作,有利于解决其中的兼容难题。 |
| 6. | Micromechanical gyroscopes manufactured in ic technology combined with micromachined process has small size , driving and detecting are difficult . nowadays the research of the electronic interface circuit is the key point in the field of micromechanical gyroscopes
微机械陀螺采用集成电路工艺和微细加工技术制造，尺寸微小，驱动和检测困难，目前接口电路的研究是微机械陀螺研究的重点和难点。 |
| 7. | Because of the advantages of “ low temperature processing ” and “ directing writing ” , laser assisted micro - processing of semiconductor can be used to integrate the opto - electronic components and electronic components onto one chip , and it has a broad potential application in device fabrication
由于激光微细加工技术具有“低温处理” 、 “直接写入”等独特优势,可以实现光器件和微电子器件在同一衬底上的“分步制作,独立优化” ,必将具有广泛的应用前景。 |
| 8. | Mems ( micro - electro - mechanical systems ) is a kind of system which is manufactured on a silicon substrate by ic production technology and fine structure production technology , such as micro - sensor , micro - performer , micro signal process and control circuit and so on
微机电系统( micro - electro - mechanicalsystems以下简称mems )是指在硅片等基体上采用ic批生产工艺及微细加工技术制造的集微型传感器、执行器、信号处理和控制电路、通讯接口电路、电源等元件于一体的具有一种或多种功能的系统。 |
| 9. | It means that the cheap polymers are chosen as the substrates , and a 248nm excimer laser with flexible and automatic characters is selected as a new micro - fabrication technique . the most important problem of continuous - flow pcr chip is the transition length computation of temperature or velosity distribution from inlet to steady status
随后针对目前国内外pcr微流控芯片的研究现状,提出了采用准分子激光微细加工技术在价格便宜、生物兼容性好的聚甲基丙烯酸甲脂材料( pmma )上制备pcr微流控芯片的新方法。 |
| 10. | Micro - electro - mechanical system ( briefly named mems ) has grown up along with the development of semiconductor ' s integrate circuit minuteness machine technology and exceed exactitude machine process technology . its characteristic such as micromation , integration , batch production and inter - discipline , which has caught great attention , will bring a large progress in people ' s life
微机电系统技术( mems )是随着半导体集成电路微细加工技术和超精密机械加工技术的发展而发展起来的.其微型化、集成化、批量生产和多学科交叉等优良特性将对人类社会生活带来巨大的进步,是电子领域的新宠 |
