| 1. | Compared with the conventional chemical etching , laser assisted wet chemical etching can eliminate the effect of crystal orientation efficiently and fabricate more diversified etched pattern ; compared with the laser assisted gas chemical etching , the required condition for laser wet etching can be realized more easily and the operation can be simplified ; compared with the ion etching , it has advantages of no ion damage to substrate , avoiding over - etching and cost - effective
半导体的激光诱导液相腐蚀与普通化学腐蚀相比,可以有效地消除晶体取向影响,制作出更加多样化的腐蚀图形;与激光诱导气相腐蚀相比,其工艺条件更加容易实现,操作更加简单;与干法离子刻蚀相比,对基片无离子损伤,过度腐蚀容易控制,成本低。 |
