High accuracy kdp crystal optics is now considered as one of optics that is the most difficult to be processed for its series of disadvantageous characteristics to optics processing such as anisotropy , soft nature , easy to deliquesce , high brittleness , sensitive to temperature change , easy to crack and so on . therefore the long machining period , low percent of pass and astaticism quality has become the bottleneck of icf technology , and the surface quality control of kdp crystal processing has become the key problem to be solved in the research of icf in our country Kdp晶体零件是目前公认的最难加工的光学零件之一,因为kdp晶体具有各向异性、质软、易潮解、脆性高、对温度变化敏感和易开裂等不利于光学加工的特点,所以加工周期长、合格率低、质量不稳定成为惯性约束聚变技术的瓶颈, kdp晶体超精密加工表面质量控制问题已经成为我国惯性约束聚变研究中亟待解决的关键问题。