It was indicated by sem spectra of zno thin films that the surface of the sample was leveled off , and the crystals were felsitic Zno薄膜的sem表明，样品表面较平整，且晶粒也比较致密。
2.
It was concluded that , the structure of ito thin films were influenced by many working parameters such as substrate temperature , oxygenous pressure and substrate and so on . it was indicated by sem spectra of zno thin films that the surface of the sample was leveled off , and the crystals were felsitic 结果表明，对于ito薄膜，薄膜的光电性能薄膜结构的择优取向性和与衬底温度、溅射氧气压等工艺参数有很大关系， ito薄膜的sem表明，样品表面较平整，且晶粒也比较致密。
