谐振式压力传感器 meaning in Chinese
resonator pressure transducer
resonator transducer
Examples
- Resonator pressure transducer
谐振式压力传感器 - The most of the successful micro machined sensors adopt the construction of micro cantilevers . for example , the resonant pressure micro sensors , and the micro machined force - balance capacitive accelerometers
而较成功的微机电传感器,如谐振式压力传感器和力平衡式电容微加速度传感器,均采用了微悬臂梁结构。 - Silicon and silicon nitride beam resonant pressure sensors with complete packages have been made successfully . the quality factor q values are about 2000 in air and rise to ~ 40000 in vacuum . both beams show a little difference in q values
成功研制出硅梁及氮化硅梁谐振式压力传感器初样器件，谐振器空气及真空中的品质因素q值分别是2000和40000 ，两种梁q值差别不大。 - The structure of the micro differential capacitance is optimized by use of the ansys software . 3 . when sih4 reacts with nh3 in a plasma - enhanced chemical vapor deposition ( pecvd ) equipment , a thin film of si3n4 is deposited on the si film
2 .研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计,利用ansys软件对微差动电容的结构进行了优化设计。 - A microstructure resonant pressure sensor measures applied pressure by detecting change of resonant frequency of its mechanical resonator . the sensor is characterized by its very small size , high accuracy , excellent stability and convenient interfacing with digital electronics , showing broad application prospects
微结构谐振式压力传感器是通过检测其机械谐振器谐振频率的变化来实现压力测量，特点是尺寸小，精度高，稳定性好，易与数字电路接口，具有广阔的应用前景。