离子鞘 meaning in Chinese

ion sheath

This paper mainly study on the technics of preparing nano - si3n4 and icpecvd . seeking for the proper parameter and technics , crystallization of nano - si3n4 powder with muffle furnace , probe the new effective way of improving the properties of nano - si3n4 powder the ion density in the reaction chamber was diagnosed by a langmuir probe . the rules were obtained under different air pressure , different radio frequency power and different position which the ion density changes about from 1010cm - 3 to 1010cm - 3 decreasing as the pressure increases and increasing as the power decreases
利用朗缪尔探针诊断了反应室内等离子体参数，得到不同位置、不同功率和不同气压下等离子体密度的变化规律，结果表明离子密度为10 ~ 8 10 ~ ( 10 ) cm ~ ( - 3 ) ，等离子体密度随着功率的增大而增大，随着气压的升高而减小，由于离子鞘层的存在，在一定条件下提供了局部等离子体密度稳定的区域。