相位扫描 meaning in Chinese

phase scanning
phasescan

3 . put forward the phase scanning method for vls grating and design the scanning device correspondingly
3 、提出了相位扫描的方法，设计并制作了相应的相位扫描装置。
4 . make the ruling experiments for vls grating using the phase scanning method . analyze the ruling error primarily
4 、采用相位扫描方法进行了变栅距光栅的刻划实验，并对刻划误差进行了初步的分析。
The experiments show that the phase scanning method is right and innovative and the ability of the sub - nanometer space increment is reached . since it only require an extra phase scanning device , the whole system has higher reliability and practicability
由于该方法只需在现有的光电式光栅刻划机上附加相位扫描装置，因而系统的整体可靠性更高、更实用。
Since the space increment within nanometer or sub - nanometer is required , it is difficult to make it only by improving the precision of the graduation system . a phase scanning method for fabricating the vls grating is suggested initially in this dissertation
实验结果表明，本文捉出的相位扫描方法原理正确，具有创新性，达到了变栅距光栅所要求的亚纳米级的栅距变化精度。