物理气相沉积法 meaning in Chinese

chemical vaporous depositon
physical vaporous deosition
pvd

Physical vaporous deosition
物理气相沉积法
And so on , the method of cvd and pvd were also discussed . through the theoretical calculation and experimental results , the distance between the diaphragm and the base plate was optimize , which will touch in case of over loading
另外也对化学气相沉积法( cvd法)和物理气相沉积法( pvd法) (包括其中的溅射法)进行了探讨。