液相腐蚀技术 meaning in Chinese

liquid etching technique

The purpose of this thesis is to develop the laser assisted wet chemical etching on the gaas substrate . the main contents and contributions include : 1 ) laser - assisted wet mask - etching method and poles - etching method have been proposed laser - assisted wet mask - etching method is that the area which need not etched is covered by mask film , and the uncovered area is processed by laser induced wet etching
本文的工作就是围绕半导体gaas基片的激光化学诱导液相腐蚀技术开展的,主要的研究结果和创新之处如下: 1 )提出了激光诱导液相抗蚀膜掩蔽法和电极腐蚀法抗蚀膜掩蔽法是指在基片表面不需要腐蚀的区域用抗蚀膜覆盖,激光照射在无抗蚀膜区域,对基片进行腐蚀。