氮化硅薄膜 meaning in Chinese
silicon nitride film
Examples
- Preparation and properties of si3n4 films on sapphire and si substrates
蓝宝石和硅衬底上氮化硅薄膜的制备和性能研究 - The influence of deposition parameters on chemical structure and optical properties of silicon carbonitride film
沉积参数对碳氮化硅薄膜化学结构及光学性能的影响 - Sinx thin film can improve the minor carrier lifetime of both mono and poly silicon by the simultaneous surface and bulk passivation
9 ）的提高；先沉积氮化硅薄膜再氢等离子体处理能得到更好的钝化效果。 - The experiments indicate that the deposition rate will increase with the increase of the flow ratio of sihu / nhs , slightly decrease with the increase of substrate temperate , and increase obviously with the increase of rf power
氮化硅薄膜的折射率随硅烷氨气流量比增大而增大，随温度升高而略有增加，随淀积功率增大而略为降低。 - The results show that the thermal diffusivity of thin film is smaller than its corresponding bulk material , and with the decreasing of the thickness , the thermal diffusivity also decreasing
)的二氧化硅薄膜、氮化硅薄膜、多晶硅薄膜的热扩散率，实验结果表明，薄膜的热扩散率比其体材料的要小，并且随着薄膜厚度的减小，热扩散率也减小。