正性抗蚀 meaning in Chinese
positive resist
Examples
- Using computer - aided alignment method , the schwarzschild optics was assembled with wave - front error of 18nm in rms value which is a good match to the simulation wave - front error by introducing figure errors of primary and secondary mirrors using zemax optical software . positive resist of zep520 ( nippon zeon co . ltd ) was employed in exposure experiments
在集成后的euvl原理装置上，采用zep520 ( nipponzeonco . ltd )正性抗蚀剂及掩模调焦方案，初步进行了透射掩模的曝光复制实验，国内首次获得了0 . 75 m线宽的euvl复制图形，完成了euvl的原理性贯通。