柯勒照明 meaning in Chinese
kohler illumination
Examples
- Kohler illumination was used in proximity lithography , and a fly ' s eye lens was adopted to form multi - point source in order to uniform the light intensity on the mask plane
摘要接近式光刻中一般采用柯勒照明系统，并采用蝇眼透镜形成多点光源均匀掩模面的光场分布。