投影物镜 meaning in Chinese
projection objective
Examples
- In initial result , line width of 0 . 75 u m was replicated on resist - coated wafer , and using more narrow mask imaging experiments are being carried out to find the imaging ability and the best focus position of the optics
目前，利用更细线宽透射掩模的曝光复制实验正在进行中，以获得最小的复制线宽及schwarzschild微缩投影物镜的最佳焦面。 - The roughness of wyko and afm measuring are 0 . 73nm and 0 . 56nm in rms value respectively , in both primary and secondary mirrors , and will severity reduce the schwarzschlid optics throughput and the contrast of the image
73urn ） sm ， wyko检测结果）波纹度和高频段的0 56urn （ ms ， afm捡测结果将严重影响schwarzschild微缩投影物镜的成像对比度和传输效率。 - The projection optics with aspherical mirror of sub - nanometer accuracy are required to get a resolution of less than 0 . 1 m m and wide exposure area simultaneously . the precision of polishing and testing for such ashperical surface is fairly high and it has not been achieved yet in our current state
Euvl微缩投影物镜为了同时实现大的曝光视场和0 . 1 m以下的成像分辨率，微缩投影光学系统需采用面形精度达亚纳米量级的非球面，但我们现阶段的光学加工和检测技术距此要求尚有一定的差距。 - The primary and secondary mirrors of the schwarzschild optics were fabricated in our institute and measured using zygo mark iv interferometer . figure errors were observed in both primary and secondary mirror of 5nm ( rms ) . these magnitudes are very small at visible wavelength but sufficient to cause significant degradation in the wave - front quality of the schwarzschild optics in extreme ultraviolet ( euv ) wavelength
利用zygomark干涉仪检测的schwarzschild微缩投影物镜主、次镜面形精度表明，对可见光工作波段已具有足够高的面形精度，均为5nm ( rms ) ，但在euv ( extremeultraviolet )波段，将给schwarzschild微缩投影物镜带来严重的波面误差。 - It might preferable , however , to use shperical mirror for the first step studies of euvl in a series investigation of system design , component fabrication , assembly technique and experimental process . along this thought , the author designed a schwarzschild optics using spherical mirrors with 10 : 1 reduction projection optics
作为研究的第一步，出于进行euvl原理及系统设计、光学元件的制备、系统集成、掩模曝光实验等相关技术研究目的，采用球面schwarzschild微缩投影物镜是比较切实可行的技术方案。