微型结构 meaning in Chinese

microstructure

Micro electro - mechanical system ( mems ) refers to a kind of microapparatus or microsystem which combine microstructures , microsensors , microactuators as well as corresponding signal disposal control circuits into a whole . it is the product of combination of varied disciplines including machine , material , information and autocontrol and so on
微机电系统是指集微型结构、微型传感器、微型执行器以及相应的信号处理控制电路等于一体的微型器件或系统，它是机械、材料、信息与自动控制等多种学科相结合的产物。