微动装置 meaning in Chinese

microinching equipment

A device was constructed , which is made up of a detector , a three demension micromovement device with high precision which can be controlled at long distance , an enough large target chamber , a serial balzers pressure stabilizing system which can measure and adjust the pressure and an electronic acquiring system to measure the ionization distribution
它包括探测器、可远距离遥控的高精度三维微动装置、足够大的靶室系统、可对工作气体的气压进行测量和调节的气压稳定系统以及进行电离分布研究的电子学系统。