微动台 meaning in Chinese

micropositioner

The control circuit , the core of which is intel 8254 ic was designed . it succeeded in driving xyz spindles , rotatable table and shield plate
实现了对微动台xyz轴的精确运动控制、转台和旋转掩模板的转动控制。
And the theory of the finite element method , the orthogonal test method , and the regressive interpolation are described in chapter three . in chapter four , a new 3 dof micro - displacement systems was brought out based on the analysis of the research results in the area of the multi - dof micro - displacement electro mechanical systems
第三章对有限元计算方法、正交试验及回归分析方法的基本原理和试验方法作了简单的阐述，建立起相关的数学模型，为柔性铰链的设计和微动台的设计提供理论依据。