定位工作台 meaning in Chinese
positioning table
Examples
- Displacement of micropositioning table combined with michelson interferometer
用迈克尔逊干涉仪测微定位工作台的位移 - In this paper , the development trend of micro - electronics equipment , the progress situation of precision work stage for laser photolithography equipment and the research and evolution of magnetic levitation technology in china and other countries are discussed generally . the main function , the demand of technical index and key technology of laser photolithography work stage are introduced simply . the magnetic levitation technology and the work principle of linear motor are stated , and the design and analysis method of mechatronics cad / cae for magnetic levitation precision stage is presented
本文综述了微电子制造设备发展趋势及其精密工作台如光刻机工作台的国内外发展现状及磁悬浮技术研究进展，简要介绍了光刻机工作台主要功能、技术指标要求、组成及关键技术，概述了磁悬浮技术及直线电机驱动的工作原理，着重研究用机电一体化cad cae集成技术设计、分析磁悬浮精密定位工作台的方法，阐明了应用cad cae技术研制磁悬浮精密定位工作台的现实意义。 - Combining magnetic levitation technology and linear motor drive technology , applying cad / cae method , a new magnetic levitation precise stage is designed and researched , which is step and precise position mechanism in 1c chip manufacture equipment of micro - electronics trade such as laser photolithography equipment . it is an innovative research
将磁悬浮技术和直线驱动技术相结合，采用cad cae技术手段设计研究了一种新型磁悬浮精密定位工作台，它是针对微电子行业ic芯片制造设备如光刻机而研制的快速步进、精密定位机构，是创新性研究。 - In order to research work principle and performance for magnetic levitation precise position stage , this paper mainly researches the principle prototype of the stage through mechatronics cad / cae . the 3d solid models of the principle prototype were built , the mechanism simulation and interferential c hecks were done by using ugnxl . o software . by translating three - dimension into two - dimension and drafting , the 2d draws were got
为了对磁悬浮定位工作台的工作原理、性能进行深入研究，从基础作起，本文主要对磁悬浮定位平台原理样机进行了机电一体化cad cae研究，进行了原理样机的虚拟样机设计，机构运动分析仿真和干涉检查，将三维转成二维，进行cad详图设计，并在cad结构设计基础上，进行了电磁场分析、有限元力学分析、原理样机制作和实验测试。