外干涉 meaning in Chinese

external interference

The methods and systems ( including amplitude division double - beam interference system , three - beam interference system , liquid immersion type deep uv interference system and full automatic interference photolithographic system ) for amplitude division maskless laser interference photolithography are studied and compared
研究和比较了振幅分割无掩模激光干涉光刻方法和系统，包括振幅分割双光束干涉系统、三光束干涉系统、液浸式深紫外干涉系统及全自动干涉光刻系统。