分辨率增强技术 meaning in Chinese

ret resolution enhancement technology

We encoded and optimized the filter to design the algorithm for filter . computer simulation of complete simulation has demonstrated that the new filtering technique can significantly not only reduce the width relative deviation and the area relative deviation of the image , but also improve the resolution and the focal depth . it provides directive basis for the development of the experiment and the practicability of the technology
计算机模拟结果表明，通过在非瞳孔面的适当分数傅立叶变换面上加入优化设计的位相型滤波器，可有效减小光刻图形的线宽偏差和面积偏差，提高成像系统的分辨率和焦深，为分数域滤波改善光刻图形质量实验的开展和这一分辨率增强技术走向实用化提供了指导依据。