分离室 meaning in Chinese

separating chamber

In this paper we deposited solar cells with pin structure on glass substrate by use of separated pecvd system . the main work can be summed as following : l ) the u c - si : h p - type layer has been deposited and the comparison of i - v characteristics between the cells made with u c - si : h as window layer and the cells made with a - sic : h as window layer shows that the cells with u c - si : h as window layer have better performance
本文主要利用分离室pecvd系统在玻璃衬底上沉积pin结构太阳电池，主要工作可总结如下： 1 ) p层微晶结构的沉积；用c - si : h与传统所用的a - sic : h分别做电池的p层，比较了二者的i - v特性，发现c - si : h作为电池的p层有更大的优越性。