低压放电 meaning in Chinese

low pressure discharge
low-voltage discharge
reduced pressure discharge

The result shows that argon gas can not only promote the excitation of plasma at low pressure , but also improve discharge state , increase the density and activation of reaction radical and improve the quality of diamond films . on the other side , argon can cool the plasma and maintain low temperature of substrate due to its big ionization section and high collision probability with gas molecules
结果表明，气体系统中引入氩气一方面不仅有利于维持低压放电，而且改善放电状态，提高反应活性基浓度和活性，提高低温沉积金刚石膜的质量；另一方面，由于其大的电离截面使其和电子碰撞的几率大大提高，对等离子体进行冷却，有利于基片温度的降低。