xtem meaning in Chinese

透射电镜

The soi is of crystal quality and the box is uniform in thickness , with the interfaces of si / sioa / si smooth and sharp . we have systematically studied the dependence of the formed soi structure on the process parameters , such as ion energy , implantation dosage , substrate temperature , as well as the annealing temperature . with xtem , sims , srp , rbs , ir , raman , aes , xps and other characterization tools , it was found that a dose window at fixed energy for water plasma ion implantation to form high quality soi structure similar to the conventional simox process exists
本论文还系统地研究了不同注入剂量、注入能量、注入时基底温度以及退火温度对所形成soi结构性能的影响，借助xtem 、 sims 、 srp 、 rbs 、 ie 、 raman 、 aes 、 xps等测试分析手段，我们发现，与传统注氧隔离( simox )技术类似，存在着“剂量窗口”形成优质的soi材料，但在水等离子体离子注入方式中soi材料结构质量对剂量变化更为敏感，随着注入剂量的增大， soi材料的埋层厚度增大而表层硅厚度减小。