superfrequency meaning in Chinese

特高频

With the development of micro - electronics and information processing , microelectronic devices with high density , high velocity and superfrequency have been get rid of the stale and brought forth the fresh , which vastly prompt the development of the micro fabrication technologies to the field of the hyperfine , and put forward the higher requirement for the resolution of the conventional photo 1 i tho graphy
随着微电子和信息技术的飞速发展，高密度、高速度、超高频微电子器件不断推陈出新，促使微细加工技术不断向着超精细领域发展，对传统光学光刻技术的分辨本领提出更高的要求。传统光学光刻中提高分辨率往往是以牺牲系统焦深为代价的。