sih4 meaning in Chinese
硅烷
Examples
- Sih4 gas for electronic industry - silane
电子工业用气体硅烷 - We studied the relationship of pressure , flux of sih4 and substrate temperature with deposition rate of a - si : h films
我们研究了工作气压、 sih _ 4气体流量和衬底温度等工艺条件与a - si : h薄膜沉积速率的关系。 - Third , we designed a waste gas disposing equipment , through which the danger gases such as sih4 can be get rid of by the nitrogen diluting and the rinsing of alkali solution
设计并制作了尾气处理装置，使设备排出的尾气能够经氮气稀释和碱水清洗而除掉其中的sih _ 4等易燃有害气体。 - The dissertation mainly focuses on variation of the structure of a - si : h as functions of the dilution ratio of h2 / sih4 , substrate temperature and substrate position at low microwave power
在低微波功率下，本论文着重研究了h2 sih4稀释比、衬底温度和衬底位置对a - si ： h薄膜结构的影响。 - Without using the doping of ge , plasma enhanced chemical vapor deposition ( pecvd ) of thick silica films on si substrates with gas mixtures of sih4 and n2o has been investigated
实验以硅烷和氧化二氮作为反应气体，采用等离子体增强化学气相沉积( pecvd )技术，在单晶硅衬底上制备了用于平面光波导的二氧化硅薄膜。