microlithography meaning in Chinese

缩微平版印刷术
微刻

Microlithography processes : study the interaction between photoresists and exposure light . application : microlithoghy
二)微显影制程:研究光阻与曝光光源的作用.应用:微显影
Now , many kind of 3d microstructure fabrications were developed , in which microlithography was changing characteristics in local area of photoresister , which illuminated uv light
延伸传统精密加工方法之微加工系统方法，其中之微影加工技术是利用紫外线光线照在光阻产生变化，使得显影作用于光阻剂的局部?围。