We tested and analyzed the translation and angular misalignment sensitivity of the collimators for the switch assembly . the characteristics of switching speed was compared with that of a numerical solution by using finite element analysis ( fea ) and a good agreement was obtained 然后通过有限元分析软件ansys对微驱动单元进行了电磁场分析,并对光开关的开关时间进行了计算,计算结果与实际测量结果相近,此开关实测速度小于2ms 。