靶阴极 meaning in English
target cathode
Examples
- As the partial pressure of o2 increases the cathode voltage of the target increases in order to maintain the same current intensity and the sedimentation rate gradually decreases
氧气分压的增大，维持同样溅射电流强度的靶阴极电压增大，薄膜的沉积速率逐渐减小。