面群 meaning in English

plane group

For films thinner than 1 m , the preferred orientation was ( 101 ) and ( 104 ) plane while the sputtering gas was ar only , and the preferred orientation was ( 003 ) plane while the sputtering gas was ar and o2 mixing . this is because of the excessive o in the licoo _ 2 film produced by the ar / o2 r . f
当薄膜厚度在1 m左右时,以ar 、 o _ 2混合气氛为溅射气氛,薄膜中晶体生长的优选晶向为( 003 )晶面群方向;以ar气为溅射气氛,薄膜中晶体生长的优选晶向为( 104 ) 、 ( 101 )晶面群方向。