铜膜 meaning in English
copper film
Examples
- Studies on the stress of copper interconnects include the stress measurement by xrd , computer simulation and observation the local stress distribution with snam
利用薄膜应力测试分布仪和xrd测量硅基铜膜及铜互连线薄膜宏观应力。 - Brass wires are winded between two metallic electrodes located in a vacuum chamber , where 2 m thickness films are deposited onto the substrate glass after explosive wires discharging
实验结果表明:玻璃基体表面被镀上一层致密的铜膜,具有与金属类似的导电性。在扫描电镜下观察,膜厚约为2 m 。 - Studies on the microstructure of copper interconnects include the determination of grain size by afm and sem , the measurement of texture by xrd and ebsd , the evaluation of barriers by xps and aes
铜互连线的微观结构的研究：通过afm 、 sem 、 tem等的分析方法对铜膜及铜互连线薄膜的晶粒尺寸进行了评价。 - Xrd analysis results reveal the electroplated copper film has strong cu { 111 } texture and cu { 111 } texture weakens after annealed . the cu { 111 } texture of copper film in trenches is obviously weaker than that of the blanket copper film
在沉积态铜膜存在较强的铜{ 111 }织构，热处理以后铜膜的织构减弱，铜互连线沟槽中铜{ 111 }织构要弱于铜膜的铜{ 111 }织构。 - The results show the grain size becomes larger along with elevated temperature and the grain size in interconnects does not change evidently after annealed at 200 ? because of the effect of the trench structure
结果显示热处理后铜膜晶粒长大，但铜互连线薄膜由于沟槽结构对晶粒的长大有阻碍作用。利用xrd和ebsd测试方法对铜膜及铜互连线薄膜的织构进行评价。