误差因子 meaning in English
error factor
Examples
- The impact of the effective resist diffusion length to the exposure latitude and mef ( mask error factor ) for the 0 . 13 m photolithography and beyond is presented
展示了在0 . 13 m及以下工艺中等效扩散对能量裕度和掩模版误差因子的影响的研究结果。