电子束蚀刻 meaning in English
electron beam lithography
Examples
- The most prevalent procedure is to use photolithography or electron - beam lithography to produce a pattern in a layer of photoresist on the surface of a silicon wafer
最常用的步骤是用光蚀刻或电子束蚀刻法，在矽晶圆表面的光阻层上制作出图案。 - Although the creation of a finely detailed bas - relief master is expensive because it requires electron - beam lithography or other advanced techniques , copying the pattern on pdms stamps is cheap and easy
虽然得花上大笔金钱，才能以电子束蚀刻或其他高阶技术制作出有精密细节的浅浮雕主片，但要复制pdms压模的图案却是便宜又容易。