电子束曝光机 meaning in English
electron beam exposure apparatus
electron beam exposure equipment
electron exposure equipment
Examples
- General specification of electron beam exposure system
电子束曝光机通用技术条件 - Electron beam exposure apparatus
电子束曝光机 - In this article we briefly introduce the e - beam lithography techniques , and we describe our experiences in the modification of an sem into an e - beam writer
以电子显微镜改装成的简易电子束曝光机在性能上虽比不上设计精良的专业化电子束曝光机，但在很多情况下可以符合研发工作的要求，可说是经济实用的方案。 - A whole scheme of a new kind of digital pattern generator of the e - beam lithography system is given , including system function , hardware and software design
本论文介绍了扫描电子束曝光机图形发生器的总体方案、系统设计、硬件实现和软件编程等，提出了一套完整的图形发生器硬件方案，并完成了图形发生器接口的设计。