测量探针 meaning in English

instrumentation probe
measurement probe
measuring probe

In order to resolves this problem , this paper put forward a parallel way of laser trim table with measure stitches , realized laser trim table ' s high speed change - line
针对这个问题，提出了一种光刻平台与测量探针组的并行工作方式，实现了光刻平台的高速换行，解决了光刻平台的速度问题。
For some reasons such as mechanic fault and miss operation , the expensive measure stitches and fine laser trim table can be broken . in order to resolve this problem , this paper discuss reliability design , with which the laser trim table system can realized dynamic fault diagnose and self - protect , and it protect the optical system , laser trim table and measure stitches
为了避免由于机械故障或人为误操作等原因，对昂贵的测量探针组以及光刻平台等精密运动器件造成损坏，对光刻平台系统进行了可靠性设计，使其具有了动态故障自诊断和自保护功能，保护了光学系统、光刻平台和测量精密探针组的安全。