捕获中心 meaning in English

trap center

Additional annealing experiments in nitrogen atmosphere revealed that the heavily damaged region with hydrogen - induced defects appears to be the adsorption center for the outside oxygen to diffuse into the silicon during the high - temperature annealing process , and consequently , broaden the thickness of the box layer . this important finding may provide a possible solution to reduce the cost of the conventional simox - soi wafers while maintaining a desirable box thickness
独特设计的氮气氛退火及分步退火实验证明了原注入样品的缺陷层中氢及氢致缺陷的存在使得在退火过程中加速外界气氛中的氧扩散进来，并成为强捕获中心使扩散进来的氧滞留于缺陷层从而促使氧缺陷层中的氧沉淀生长，加速了高温退火中的内部热氧化过程，从而形成了比传统相同剂量simoxsoi厚得多的氧化埋层。