扩展电阻 meaning in English
spreading resistance
Examples
- Test method for measuring resistivity of silicon wafers using spreading resistance probe
硅片电阻率测定扩展电阻探针法 - The experimental instruments , apparatus and the means to prepare all the samples are introduced in the first section . in section 2 , the experimental system including the oxidization system and diffusion system , are introduced therein . in section 3 , the samples preparation including the pre - deposition , redistribution and re - oxidization , the samples of b doping , and the fabrication of ga - diffusion transistor , b - diffusion and the transistor formed by b diffusion following ga diffusion are detailed therein , and the as - prepared samples are analyzed by sims , srp and four point probe
首先介绍了制备各种样品所用的实验仪器、设备与方法；第二节中介绍了实验系统，包括氧化系统、扩散系统，第三节介绍了样品的制备，包括ga的预沉积、再分布、二次氧化样品，扩硼样品，以及扩嫁晶体管、扩硼晶体管和扩镰后再补充扩硼晶体管的制备流程；实验所得样品，借助二次离子质谱（ sims ） 、扩展电阻（ srp ） 、四探针薄层电阻等先进的测试分析方法进行分析。 - In this paper , the relationship of the thermal donor with point defects was investigated by injection of different concentration and distribution vacancy via 1250 ? , rtp preannealing in different gases ( n2 o2 , ar ) . the influence of rtf preannealing on generation at 450 ? and annihilation at 650 ? of thermal donors ( td ' s ) was not detected
本论文通过不同气氛( n _ 2 , o _ 2 , ar ) 1250 30s高温rtp预处理在硅片中引入不同浓度和分布的空位，进而用四探针和扩展电阻研究450不同时间热施主的生成特性和650热施主的消除特性，从而确定热施主和点缺陷之间的关系。