微元件 meaning in English
microelement
microlelement
Examples
- In order to facilitate the advancement of micro - fabrication and micromachine technologies , development of measurement methods for both profile and dimension of micro - components are essential . one of the methods available for this is a small three - dimensional profile measurement apparatus with micro - probes . for such an apparatus , the probes must be fabricated with optimal shape for individual part measurement . in this research , micro - electrical discharge machining ( micro - edm ) which has extremely small machining force and is applicable for fabrication of various types of probes , is used for probe manufacturing . various types of probes which are installed to the small three dimensional profile measuring apparatus based on principle of scanning tunneling microscopy ( stm ) are fabricated by the proposed method . the probes fabricated have been successfully used for the measurement of several micro - parts and the results show the effectiveness of the proposed method
为了推动微加工和微机械技术的进步,微型零件轮廓和尺度测量方法的发展非常重要.可行方法之一就是使用带微探头的小型三维轮廓测量仪.这种仪器的探头必须针对某个零件的测量,按照最佳外形制造.微放电加工有着极小加工力,可用于各种探头的制造,本研究中用它进行探头加工.用这种方法制造了多种探头,将其装在基于扫瞄隧道显微技术( stm )的小型三维轮廓测量仪上.所制造的探头已被成功地用于各种微元件测量,结果表明此方法可行