反应离子刻蚀 meaning in English
reactive ion etching rie
rie
Examples
- Fabrication of ultra deep electrical isolation trenches with high aspect ratio using drie and dielectric refill
用深反应离子刻蚀和介质填充技术制造具有高深宽比的超深电隔离槽 - The reactor is capable of working in the rie ( reactive ion etching ) mode and also in the plasma etching mode
反应腔拥有在rie (反应离子刻蚀)模式和等离子刻蚀模式下工作的能力。 - The typical rie fault was illustrated to build up the fault tree and qualitatively analyze rie fault by resolving the minimum practical fault
以反应离子刻蚀( rie )设备的典型故障为例，建立故障树，通过求解最小实际故障来进行定性分析。 - Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching ( ecr - rie ) equipment to improve its property of weave
摘要采用微波电子回旋共振等离子体反应离子刻蚀( ecr - rie )装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。 - By studying and using conventional 1c process in combination with electron beam lithography ( ebl ) , reactive ion etching ( rie ) and lift - off process , several efficient results are produced : semiconductor and metal nano - structures are fabricated ; the matching problem of photolithography and electron beam lithography is well solved ; the process efficiency is improved ; the process is offered for the controlled fabrication of nano - structures by repetitious process testing ; several nano - structures such as si quantum wires , si quantum dots , double quantum dot structures and tri - wire metal gate are firstly fabricated by using ebl and rie processes
研究利用常规的硅集成电路工艺技术结合电子束光刻，反应离子刻蚀和剥离等技术制备半导体和金属纳米结构，很好地解决了普通光刻与电子束光刻的匹配问题，提高了加工效率，经过多次的工艺实验，摸索出一套制备纳米结构的工艺方法，首次用电子束光刻，反应离子刻蚀和剥离等技术制备出了多种纳米结构(硅量子线、量子点，双量子点和三叉指状的金属栅结构) 。